What are the conditions of making top electrode by mini-sputtering (time)?
Is it right to bond a wire with conductive paste on the top electrode?
Yes you can easily sputter top electrodes on piezoelectric films.
In case of PZT researchers have used Al, Gold, Ti/Pt electrodes.
In case of ZnO you can use the same electrode materials.
The higher the frequency you are working, it is better to use Gold electrodes.
You can also attach very thin wires by conducting paste, and with a temperature controlled soldering gun, you can solder wires to the top electrodes carefully.
Try to see in the literature how people have made different electrode structures, on piezoelectric films and thin crystals, and where they have attached thin wires.
K. Sreenivas
Thank you very much. And what is the time of sputter ? how long will be OK?
You should have a thickness of at least 2500 to 400 angstroms, and good conductivity for the deposited electrode.
K. Sreenivas
I completely agree with the answers of Pr Sreenivas.
Furthermore it is often necessary to anneal the top electrode to improve the electric properties (typically 600/625°C 30min in air).
Finally, I insist on the thickness (80 to 120 nm) of the top and bottom electrodes which modify rather strongly the values of Pr and Ec
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