12 December 2014 4 360 Report

I want to use a water lute to balance the pressure in a CVD instrument, the pressure in the chamber is increasing from 1 Pa to more than 1 atm, because this instrument will leak higher than 1 atm, so I have to open the valve before the pressure reach 1 atm, e.g 0.9 atm, and also make sure there is no air bubbles at the water lute valve position or the air will leak into the chamber.

Is there any specialist who can help me design a new water lute valve? Can I use a ball valve at the water lute position to seal the water and the vacuum in the beginning when the pressure is about 1 Pa?

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