Generally we will say if less than 1% hetroatom is doped than its a doping but if it is more than 1% than its a substituion and its behaviour will change. But, if you calculate XRF it will not give information less than 1%. How can we know how much hydrogen is there?
From the numerous methods used to determine the composition - not many are left when you talk about
Thank you Sir for your valuable suggestion can you tell light elements like Hydrogen what minimum alloying percetage can be possible to calculate the Quantitatively accurately??
so may be SIMS can detuct it??
Among different techniques to measure hydrogen, the hydrogen forward scattering spectroscopy (also known as elastic recoil detection analysis, ERDA) is perhaps the most widely available from different ion beam laboratories. It has a limited depth resolution, so if one has strong hydrogen contamination at the surface and at the interface, the quantification accuracy for a 100 nm thick film is not very good. Another ion beam analysis technique would be nuclear reaction analysis (NRA) using 15N beam, and this technique has better depth resolution and also quantification possibility even down to ppm levels. Both conventional ERDA and NRA require proper reference samples in accurate quantification.
One additional technique for measuring not only hydrogen but also Ti, O and even C, N and other impurity concentrations in a single measurement is the time-of-flight ERDA (TOF-ERDA). For hydrogen the minimum hydrogen quantification percentage depends on film thickness and surface+interface hydrogen contamination. As a rough estimate, I would say that from 20 nm thick TiO2 films one can quantify 1 at.% hydrogen accurately and from 200 nm thick TiO2 the quantification limit is about 0.1 at.%.
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