Kindly find the attached article regarding the same.

https://www.sciencedirect.com/science/article/pii/S0921883117304260

If under defect structures you mean crystallographic defects, then EDAX is mostly useless, and there are a lot of literature on application of XRD.

Which type of defects would you like to analyze?

@Imad Disher

Structures defects

@Vladimir thank you

There are many types of defects in the structure, these include the following categories:

1- Point defects.

2- line defects.

3- plane defects.

4- bulk defects.

There is NOT one technique that can be used to analyze all these types; thus, it will be helpful if you make your question more specified.