Hi

please guide me!

I made the thin layer of ITO by using Pyrolysis spray method.

but I can't find a way to measure its dielectric coefficient.(i need imaginary and real part of it)

I have tried the flat capacitor method before, but the value obtained for materials with a known dielectric coefficient has been obtained with a very large error.

Although I'm not sure how to arrange the capacitor parts!

And how can only the coefficient value for the nanometer layer of ITO be obtained with this method?(Remove the glass substrate from the calculations)

many thanks

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