I am depositing WS2 thin films using magnetron sputtering to be used as electrode material for supercapacitive application. I have tried various substrates( Stainless steel, ITO) but failed to obtain good adhesion. I have also tried depositing WS2 on wetting layers( Au,Ti, Cr), still my electrode was not able to sustain long.

Is there any other way i could try to improve my thin film adhesion?

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