Plz specify the material's chemistry and XPS apparatus.
Basically all XPS softs include the std sensitivty factors and based on Scofield method, they allow to calculate relative concentrations based on the area of the peaks of interest.
You need to select the boundaries of appropriate core levels peaks, then click on the right button and you will get values...!
Several corrections can be applied to the values to take into account the differences in escape depth and the analyzer transmission function correction. But that is for more in depth studies than what you may be interested in at the moment.
Please give more information concerning your sample.
As said previously, you need to know some correction factors concerning the elements that your sample includes. You also need to know the analyzer parameters.
Please choose the peaks (originated from each elements) very close in enegy then the electrons have the same escape depth.You can calculate the area under each peak which is normally proportional to the concentration of each element.