I use spectroscopic ellipsometry to determine the film thickness and refractive index of oxide thin films on silicon with VASE software from JA Woollam. The thing is i am not able to extract the dielectric function of the material film layer although the software gives combined pseudodielectric function of all the layers.
Hello Jagannath,
I use this software almost everyday. If you want all the optical constants to be expressed as epsilon1 and epsilon2 (dielectric function), you have to change the defaults values in VASE: in VASE, go to 'global' (top right in the menus), select 'defaults', and choose 'e1 and e2' for 'Specify Optical Const. in'. After this selection is made, all the optical constants will be expressed in e1 and e2, including the results of your fits.
Hope that this solve your problem. Let me know.
Dear
Basically use the Cauchy model as a layer for this material, and do not forget to ad the roughness to make sure you do not average over Material and air
then plot it and get the parameters of cauchy
n = A+b/lambda^2 + c/ lambda^4
e = (n)^2
just avoid the absorbing regime
regards
Hamad
Thank you all very much for the kind responses especially you Sir @Daniel Poitras, it helped me right away. Sir, @Hamad A. Albrithen it was very helpful for basic knowledge. But sir (@ Z.P. Ling) CODE is a commercial software, right? The publication of yours was beautifully explained.
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