How can I add a compound target material like Gallium oxide (β-Ga2O3) in SRIM application?

13 October 2021 1 3K Report

I am trying to simulate ion-implantation in a compound target material like Gallium oxide (β-Ga2O3). But it seems like the material support is not available.

Is there any way I can update the target material library?

Debarati Bhattacharya

You can try with the (known) density of the compound in the program and run it, instead of updating the library.

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