Hi, Recently EDX performed on a Zn(S,O) thin flm of aprrox. 90 nm gave atomic percentage which isnt clear to me. O: 98%, S: 0.8%, Zn: 1.2%

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Jeffrey J Weimer

Analysis with EDX samples 1-2 microns. This is deeper than your film. For the thickness of your film, XPS would be the better technique to use. Set the take-off angle to a smaller value to be more sensitive to composition at the surface.

Vladimir V. Shilovskikh

I'd advice you to use mount doesn't containing any elements present in your thin films (e.g. silicon plates) if possible. And one should remember that EDX having little accuracy for light elements such as oxygen.

You can check whether oxygen content is caused by SLG aquiring EDX with lower voltages. If oxygen content will decrease significantly it is probably caused by SLG

Mohammad Tanvirul Ferdaous

Thanks a lot Jeffrey J Weimer. Probably it sampled SLG too.

Thanks Vladimir V. Shilovskikh. Make sense.