Dear Hamidouche, the penetration depth depends on your excitation energy and your sample, as well as on the geometry. Provided that you do not apply the grazing incidence geometry, you may easily calculate the penetration into your sample e.g. using the Centre of X-ray Optics webpage.
http://henke.lbl.gov/optical_constants/filter2.html
Simply add your approximate sample composition and density, and you may get the transmission by a certain thickness you fill in the form. This way you may find the depth, in which the signal decreases to e.g. 1/10 or 1/e, from which more than 90% of your XRF-signal will originate. Keep in mind however, that the excited X-rays have to find their way back to the detector and thus keep in mind their absorption as well.
things become more complicated in the GI-geometry, this is a new story ...
Hope this helps, Dirk
Dear colleague, Dirk answered your question in a fine manner. I suggest having a look into a textbook for getting an impression of the complexity of physics behind XRF. If you take a more modern issue all possibilities will be contained. However, the classical book is that written by E. Bertin. Good luck. Alex
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