Unlike the (001) oriented thin films, the d-spacing is the lattice parameter along c axis, for the (110) or (111) oriented epitaxial thin films, how could I calculate the in-plane and out-of-plane strains basing on the XRD results?
In order to achieve rabbis (110) or (111), it is necessary to make a change in the direction of deformation by making angular channels commensurate with the desired changes in the local directions.
With a desire for success in scientific and research work.
Thanks for your answer. But I am still confused a little bit. Could you explain the analysis process in detail?
For example, in the (110) case, do you mean that I need to calculate a*cos(45o), and then compare with the d-spacing result to get the out-of-plane strain?