Is there any formula to calculate Film thickness from Psi and delta graph as a function of wavelength obtained from Ellipsometry?
Yes, there is. See e.g. pp.37- in the book below.
https://books.google.de/books/about/Infrared_Spectroscopy_Ellipsometry.html?id=Dp4sAAAAYAAJ&redir_esc=y
There is no formula to calculate the film thickness directly from Psi and Delta. You need at least a three-phase model, which includes the dielectric functions of the substrate and the film together with the anbient to analyse the optical response. As we know, the optical path through the layer (causing part of the phase shift) depends on the product of DF and layer thickness (correlation matrix) as well as on the angle of incidence. The necessary Fresnel coefficients can be found in many text books on ellipsometry, or you have a look on the article published in. Acta Physica Polonica A 104 (2003) 123.
I would like to know the parameters required to creat a new model in Complete Ease software
Start building an optical model to represent your sample. It's always good to start from your substrate first. You can use appropriate .mat files from the CompleteEase software library to represent your sample. Then fit the model to your measured psi and delta values and check the MSE.
If you are using CompleteEASE software I recommend to you to characterize your substrate before, and apply a Cauchy model to it. Then what kind of film do you have? You only want optical properties, or it has a band-gap?
You can try to build a model using Cauchy or Gen-Osc, using tauc-lorentz or cody-lorentz oscillator.
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