metallization can be used for your pupose.

You may do plasma cleaning for the first step followed by the addition the catalytic PdCl2. Then the substrate is exposed to a reducing bath, and then to a copper solution mixed with formaldehyde (that induces metallization).

may be you could visit: http://drum.lib.umd.edu/bitstream/handle/1903/10715/Carter.pdf?sequence=1

for more info.

I need to clean a thin monolayer of amino silane which is attached to polymer .

Yes, you can use Ar plasma for 4 to 5 min.

Thank you 

What can be the alternative cleaning method if I have to clean it with chemicals ?

Be careful that plasma treatment similar to strong UV illumination will remove(alter) the surface modification.

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