I have been searching for it for almost 4 months I have bunch of books and already have read a lot. May be my question could be more precise. Simple question doesn't always mean ignorance Sir( Mr Leoni). I am preparing for my phd thesis in which I would like to have TiO2 slabs for a resonance wavelength. I need a simple receipe for that. Not a very general lithography answers. But still thanks, Mr Pimisken and Mr Leoni.
Any further receipe kind answer will be highly appreciated.
In fact you realised yourself that simple question calls for general answer. Try modifying the question asking exactly what you want to know, as you explained here and you will get a more accurate answer. Accuracy is always the key to research.
3D photonic crystals (inverse opal-type) of good quality can be obtained by self-assembly of polystyrene microspheres and infiltration with titania by atomic layer deposition: