You can do it by using HCl (1:1 of HCl:H2O) with Zn (powder). I was putting drops of acid solution on the area to be etched followed by sprinkle (with disposable plastic pipette) of Zn powder, wait for 15-45 seconds on seeing clear surface rinse with de-ionized water and you are done. We got very sharp edges and nice results by masking the patteren with tape first.
Indium tin oxide (ITO) thin films coated on glass can be etched with HCl (diluted ~1:1 v/v, concentrated acid/water) with either added FeCl3 (2─5% wt/wt) or mixed with HNO3 (i.e. aqua regia).
1. Why not you do lithography before etching the specific regions of ITO? Provided, you have the suitable mask.
2. Alternatively, you can try with scotch tape to mask your specific portion. It works well. I have done that. Sometimes kapton tape too serves good for this purpose.
3. For etching ITO, take a cotton swab, dip at one of its sides in Conc. HCl and give a little touch in Zn dust. Finally, wipe along the regions where you wanna to etch ITO (regions where no scotch tape is there).
You can do it by using HCl (1:1 of HCl:H2O) with Zn (powder). I was putting drops of acid solution on the area to be etched followed by sprinkle (with disposable plastic pipette) of Zn powder, wait for 15-45 seconds on seeing clear surface rinse with de-ionized water and you are done. We got very sharp edges and nice results by masking the patteren with tape first.
Laser patterning is a quite important process for ITO etching, we call it selective etching,which could remove the ITO completely but remain the glass/PET substrate no hurt, we launch such process in mass production for touch panel manufacturing