Hello COMSOL users,
I am trying to investigate the effect of Electrostatic Forces on the Natural Frequency of parallel plate MEMS Capacitor in COMSOL Multiphysics.
Although the effect of voltage is inevitable when calculating the natural frequencies analytically, the COMSOL model does not consider its impact in the frequency domain. However, while doing a stationary study for the same model, the effect of voltage is seen in the displacement.
# Attached is a picture of the capacitor sensor, consisting of a cantilever beam with the applied voltage V=Vdc, and the model.
Thanks
You can see the following links:
1. https://www.nature.com/articles/s41378-018-0025-2?WT.feed_name=subjects_engineering
2. Article Frequency and displacement analysis of electrostatic cantile...
3. https://www.intechopen.com/chapters/70604
Johar Pourghader - Voltage will certainly have an effect on the bending of the cantilever beam due to electrostatic force. This can also be explained using the term "negative spring effect". The natural frequency drops with an increase in applied voltage. I am not sure about how you do it in COMSOL. I never used it. But, IntelliSuite can capture it. All the best.
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