In my carrier using both electron-based EDS and X-ray-based EDS (Micro-X-ray Fluorescence) I have experienced the 5 (reported) general types of artifact peaks. 1- Sum peaks, 2- Silicon escape peaks, 3- X-ray source peaks, 4- Compton peaks, and 5- Diffraction peaks. However, I have also experienced a 6th type of artifact peak, something I reported briefly at Microscopy/Microanalysis(1), (commonly referred to as M & M). I have also documented it in my book "Food Forensics Handbook, practice, instrumentation, case studies"(2).
Once I knew what was causing it, I put a name to it. I call it the "Ricochet Peak." Basically, it is formed by an extraneous or non-intended event. An X-ray or an electron strikes something that is not your sample. This forms an X-ray with the energy of its source. If that extraneous x-ray then bounces off of your sample and then strikes the detector (a ricochet event) it maintains the energy of its source and the x-ray detector records it as having originated from your sample. If this event is common enough, one will detect it in the spectrum and in the resulting dot map.
When I have seen this event, I was always using my E-SEM, which is mostly aluminum within the specimen chamber. So, what I see is an aluminum peak in my spectrum, when there should be no aluminum within my sample. I see this ricochet event most often when I am looking at crystalline material. What occurs is this: Some of my source electrons (or x-rays) strike a facet of the crystal. That source particle is then deflected into the sample chamber where it strikes something aluminum and forms an aluminum x-ray. If that resulting aluminum x-ray then strikes my sample at an angle that allows it to ricochet directly to the x-ray detector, it gets recorded as having originated in my sample. If this event is common enough in occurrence, I will see the dreaded aluminum peak within my EDS spectrum.
I finagled an image that demonstrates this event from a more-or-less forced situation. If interested I think I can include that contrived image in a following response. I can show the event happening in image and within the spectrum. It is a bit disconcerting to see aluminum seemingly originating from a sugar crystal X-ray dot map, the crystal is thus glowing the assigned color for aluminum.
1) St. Jeor, Var L.; "EDS-Lite, Quantitative Energy Dispersive Spectroscopy of Light Elements." Microscopy and Microanalysis, proceedings, 1 July 2017.
2) de St. Jeor, Var L.: "Food Forensics Handbook, Practice, Instrumentation, Case Studies;" (2021), copyright (2022), DEStech Publications, Inc.