What is the easiet way to obtain a 1-2um thick film of TiO2 for optical purposes. TiO2 ebeam is rather slow. I wonder if there is a faster way?
You might consider the Rapid Thermal Evaporation (RTE) technique to get even a nanometer sized thickness of your films. However, the equipment require expertise.
It is TiO2, it is inorganic. What is RTE?
Rapid Thermal Evaporation (RTE). It rapidly evaporates your sample using high rate of heating and deposits on the surface of a substrate.
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