I'm using a Sopra GES-5E Ellipsometer and the results seem to be off. A reference sample, SiO2 native Oxide, has a known thickness of 122.5nm but I get 146.8nm. The index of reflection (n) is also known to be 1.464 but I get 1.122. SiO2 is in my N,K files database so the problem can't be the model or fitting.
Any suggestion on how to calibrate?
The best place to start is the user manual of this model because the ideas people will give you are model specific
Ask the builder.
Sorry it seems rude but it is litterally the answer. I don't use same principle of instrument as yours so cannot help you. Good luck
You are right Robinson Musembi & Michel. I guess I was unclear in my question, I have read the user's manual for over 5 time but the problem is I need to enter maintenance mode of the device and the user pass is not provided by the manufacturer and they seem to be out of business or not replying. So I was looking for some basic calibration methods than can be done without entering maintenance mode. Sorry for confusion
For an in-house build ellipsometer, we created a new calibration method for simultaneously determining the source and detector imperfections, and the polariser efficiency (all done with wavelength dependence). It only requires the spectrum to be measured at a few different polarizer angles, which I hope your setup allows. Reference can be found here:
Article Simultaneous characterization of detector and source imperfe...
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