Hello,
I was etching PR with H2/N2 Plasma.
all of sudden, when I was pumping the gases out, MKS RGA spectrum shows a lot of 50 amu< peaks.
So I was wondering if I can think of peaks over 50 amu as particles.
If so, would they be split because of electron beam damage from filament?
If not, is there any way I can detect (don't have to be exact) "the particles"?
Thank you
RGA, also called quadrupole mass analyzer, is a device capable of ionizing molecules and then sorting the ions thus produced in order to detect them. It is generally designed to control the contamination process in vacuum systems. That is, they are used in most cases to monitor vacuum quality and easily detect tiny traces of impurities in gas at low environmental pressure. For more information, please take the following refences in add files.
Dear Jinwook Kim
The following article may help in this regard:
https://www.sciencedirect.com/topics/engineering/residual-gas-analyzer
Kim, Euikwoun, Junggil Lee, Jae Kyun Jeon, Yoonman Lee, Sangwha Lee, and Jae-yong Kim. "Effect of surface treatment investigated by gas adsorption on metal-oxide particles." Journal of the Korean Physical Society 52, no. 3 PART 1 (2008): 892-895.
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