I am depositing perovskite on Si/SiO2. APTES SAM (self-assembled monolayer) treatment is reported as beneficial for perovskite. Can we do UV ozone treatment after APTES deposition? Or UV treatment can remove the SAM.
UV ozone treatment on SAM coating could decompose SAM. Before SAM coating, you could treat the substrates to gain the adhesion of SAM on the substrates.
Yes. UV ozone treatment helps to increase the adhesion of perovskite. There are some other chemical treatments are also reported to increase the adhesion. You may take a look at following research articles: