In epitaxial growth film, the lattice from the substrate and the deposited film match to each other at the interface. In parallel beam XRD, the d-spacing that is sensed is the spacing of the atomic planes parallel to the substrate interface. However, the XRD measurements of d-spacing for both the substrate and an epitaxial film appear very close. Why is this almost always the case?
Vishal Saravade
The d-spacing would depend on the specific epitaxial film and the specific substrate. As Dr. Omar commented, epitaxial growth is usually designed in a way that the epitaxial film and substrate would lattice match.
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