I deposited GeS2 material by using sputter. The conditions of the experiment that I used are as follow.
Base Pressure: 1E-06 Torr (fixed)
Gas Flow: Ar 50sccm (fixed)
AC power: 25w (fixed)
Work Pressure: 10m, 5m, 1E-04 Torr
I analyzed the composition ratio of GeS2, and the result shows that the atomic percent of Sulfur increased and decreased like U-shape, but Germanium was reverse as the work pressure decreased(10m Torr -> 1E-04 Torr).
Would I know there is the relationship between deposition ratio and work pressure?
Or Would you recommend a paper or reference about this subject?
Thank you!
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