We have deposited silicon carbide on carbon substrate using one PVD technique. Due to amorphous behavior of SiC at low deposition temperature, we performed heat treatment of those films at elevated temperatures in an inert environment. Following peaks (Blue and red) emerged and potentially belongs to Crystalline SiC. These peaks somehow matched with Moissanite (one of crystalline form of hexagonal SiC) but characteristic peak (with most intensity) didn't emerge in my spectrum. We have tried different software like Jade and X'pert HighScore and also consulted literature but didn't find exact XRD phase and PDF card no. Any suggestion or recommendation of journal article related to these peaks will be appreciated.

Regards.

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