Can we use a single power supply for all the cathodes or use different power supplies for all the cathodes? Which one is better and more economical?
interesting question.. how would you connect your sputter-targets with one power supply? serial or parallel ?
if you have the same materials on your targets, a parallel solution is may be possible.
I would say each target is a diode (with own characteristic). So what would the electrotechnician say?
i think we can connect them all in parallel with a increased current rated power supply...pardon if i am completely wrong.
yes, with same impedance of each target a parallel setting can be OK.
but i believe that combining different materials , the impedance of the different target materials would make a good control of currents difficult.
and be careful to the magnetic configuration when having 2 magnetrons close to each other..
lukas
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