I have done hall measurement. I used Indium metal contact. But I -v Curve is showing saturation at edge. Is this data reliable . Can I take conductivity vale and measured sheet resistance.?
If you can measure all needed potentials in 4-point contacts/square sample geometry, you can extract both Hall carriers concentration and sheet resistance by van der Paw technique (see e.g. https://en.wikipedia.org/wiki/Van_der_Pauw_method). Although the current value should be in linear (ohmic) region to avoid interfering effects as hot carrier injection and channel pinchoff.
It looks like you amplifier was saturated at above +/-0.3nA (amplification is too high) or maximum voltage is limited by software or hardware.
First of all, you have to check what is the maximum voltage limit was selected (Voltage Compliance pre-set, mentioned by Ioannis Samaras) for this measurement.
I'm afraid that you cannot extract resistance from only Hall effect measurement. Usually, you have to use Van der Pauw or 4-point probe measurement to get the sheet resistance.
Very often the specific resistance is required to calculate Hall mobility
(http://www.tek.com/sites/tek.com/files/media/document/resources/LV_LR_e-hnbook_91113.pdf see p.14)
In this case, you have to perform multiple van der Pauw and Hall measurements for offset cancellation. If your system is configured to collect this data automatically, you will be probably able to extract it from a datafile, if available. Otherwise, you have to perform some extra measurements according to van der Pauw routine.
Few Informations that you have asked, I am mentioning below
According to company , that instrumental applied current should be such that resulting voltage should be in the range of 5milivolt to 50milivolt. They give instruction that we should not try very small current. But our film have highly resistive so we need to use low current.
I am using van der pauw rectangular sample geometry with contact at four corner. can you please provie me any suggestion what geometry shall I use for my 20nm thick films.
as I can see from attachment you have HMS-5000 Ecopia system for Van-der-Pauw measurement. If everything is fine it should be able to provide you reliable data for both Hall and resistivity measurement.
But I-V curve shows that something is wrong.
If you calculate resistance between D and A points (DA resistance) it gives you about (6V/0.2nA) 30GOhm value. You mentioned what film is 20nm thick.
Can you check if it's continuous layer?
The SEM or AFM image can give you an answer on this question.
Van-der-Pauw technique is suitable for uniform and continuous sample only.
If film thickness becomes comparable with the defects size, surface roughness, dust particles etc on your substrate it probably becomes not continuous anymore.
If sample looks like a lot of islands which are interconnected somehow it's not uniform sample anymore. Due to percolation mechanism, it can be still conductive but current lines distribution can be significantly disturbed in such a case.