A-site deficient 0.1BiScO3-BaTiO3 (BSBT) thin films were deposited on Pt/TiO2/SiO2/Si substrate by using PLD.

XPS results revealed that A-site vacancies increase with the increase of deposition temperature (510-550 C).

XRD analysis showed that the degree of (110)-texture also increases with the increase of deposition temperature or, in other words, (110)-texture increase with the increase of A-site vacancies.

It is noted that BSBT grows as a polycrystalline thin film with a random orientation at the same deposition temperature and substrate when stoichiometry is tightly controlled.

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