Can SEM EDS (Energy Dispersive Spectroscopy) differentiate between Gold and Platinum?

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Vladimir Dusevich

Yes. You need a cross section.

Yuri Mirgorod

The thinner the film, the more accurate the analysis result will be.

Venkata Ramana Mudinepalli

Of course, we can differentiate.

better go for cross sectional SEM, or TEM

what is the thickness of Pt and Au.

Khantesh Agrawal

Dear All,

The thickness of Pt is < 1nm and gold is 150 nm

You have a problem here. Au layer is too thin for EDS. You may want to use methods like SIMS or XPS.

Thomas Walther

The way to solve this problem would be to measure teh Pt?Au ratio from EDXS as function of acceleration voltage, whcih will vary the eletcron penetration depth!

Au L line is a nice one, quite workable, but you cannot go much lower than 15 kV when dealing with it (pretty high voltage for