Can Molybdenum metal with-stand in TMAH or KOH Si etching solution...?

Sushil Kumar @Sushil_Kumar142

08 August 2017 1 2K Report

I am looking for some wet-enchant for Si, who doesn't affect metals.

Peng He

Mo may dissolve in the alkaline solution. However, i think you can use inhibitor such as BTA or TAZ to protect Mo.

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