I have to coat a plastic substrate. I usually hold my substrates using little metallic clamps, but this one would need to be coated in the outer area of the whole substrate (can only hold it from the center).
Does anyone have experience or know if there's a restriction to use a magnet to hold the plastic part againts the substrate holder?
I have disconnected the power supply that we usually use to bias the holder as I'm planning to coat a dielectric. Then the only voltage that the holder may acquire is the self-bias produced by the plasma (around -20V).
I would consider that at least risky. Plasmas have been used in magnetization or demagnetization processes:
Article Power dissipated during rapid magnetization or demagnetizati...
So maybe your magnet will demagnetize and your substrate may drop.
Is it not possible to fabricate full clamps out of the plastic material?
Some call it vacuum. If you have low vacuum suction applied on the back side you will do well. Easy to apply and not affected by the plasma. Non damaging to the deposited layers when you flip the substrate. Good luck.
Can you view this paper
https://www.researchgate.net/publication/13382575_Power_dissipated_during_rapid_magnetization_or_demagnetization_of_plasmas
- Badges
- Science topic
- Similar topics
- Engineering
- Materials Engineering
- Coating