I am growing PtTe2 films using direct tellurization of Pt films in CVD system. The Raman spectra of the film is matching well with literature. But the EDAX and XPS results are not coming good. How can I accurately know that which phase of Pt/Te is forming or is there any extra Te that is sticking on surface of the film.
Thank You
Regards
Pinki
Since you are not sure about the stoichiometry, XPS should be able to answer that. It would be recommendable to verify the evaluation with a safe reference sample. If you have concerns of surface vs. bulk concentration differences, you may need to perform a destructive measurement to do a depth mapping.
Yes, there are XPS setups which allow you to sputter and measure simultaneously. It's called XPS depth profiling, see
https://www.thermofisher.com/de/de/home/materials-science/learning-center/surface-analysis/monatomic-depth-profiling.html
Alternatively, you can combine EDX with FIB, if your setup has that available.
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