The aspect ratio should be higher than 3.
Which kind of polymer? which type of etching tool? Which type of hard mask?
BCB polymer; ICP plasma tool; for the HM i can use oxide or aluminum according to the chemistry proposed.
Here could be a good start point: http://www.csmantech.org/Digests/2008/2008%20Papers/6.1.pdf
Source to get Impact factor of journals
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