The applications may include metal thin film deposition, semicondicting layer deposition and carbonaceous thin film deposition. Which one is preferable with respect to cost, ease of working etc? Please give a specific model name if you can.
I've heard that equipment from Kurt J. Lesker company is quite good. However, I don't havy any experience in this field. Nevertheless, check this company, invite guys to make a presentation in Your Institute give them few samples to do CVD and PVD and asses them performance of their equipment.
Dear Sir. I can provide you some contacts: send me one email and I will reply to you in private way (otherwise this can be considered as one advertisement, sorry).
Edwards (UK) is a long-established good company and make good PVD equipments such as Thermal Evaporation Equipment, E-beam equipment and R F Sputtering equipment. You can visit their web site and check whether they can meet your requirements.
Dear Venkatesh, There are international groups like Balzers, Varian, Vico, in addition to the companies listed by other writers. I have personal experience with Balzers PVD system - it is an excellent product. But price of imported systems will be high. If you are looking for a small system (say 12" chamber) with thermal or sputtering facility you can get one from Indian companies. There are several companies making PVD systems. As Paulsamy pointed out you can get good systems from HHV, Bangalore. However I would not recommend their e-beam source. Their Sputtering systems are OK, but insist for an imported RF power supply if you are going to use it for insulator coating. Indian high vacuum company, Bbangalore also makes good PVD systems- I don't think that they make CVD systems. Their service is reasonably good.
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