I want to deposit ZnO thin film on glass substrate using the thermal evaporation technique. But I cannot do that because ZnO is powder type and I cannot develop thin film by this powder type ZnO using my evaporator. In my thermal evaporator tungsten boat has been used as sample holder. Is there any technique to do that?
I can deposit solid Zinc thin film on glass substrate easily. Is it possible to convert Zn thin film to ZnO thin film by oxidization or other processes? Please help me.
One easy route to deposit ZnO thin films using a physical method is sputtering a ZnO target. A more easier route would be to follow a chemical process such as using zinc acetate in say IPA and spin coating followed by thermal treatment. Higher temperatures generally lead to better crystallinity.
If you want to convert Zn thin film to ZnO thin film, one can do in two ways
1. Heat the substrate in Air at 300 to 400C for 1 hr.
2. If the Zn thin film substrate can be converted into ZnO by dipping the substrate in water for 24 hrs.
Simple way to deposition ZnO thin films is via solution process. Zn acetate can be spin-coated on glass and heated at 150C for 2 min. The end product is ZnO thin film.
ZnO thin films are typically deposited by either magnetron sputtering or LPCVD. In case of magnetron sputtering, you have several options: either using a ceramic target and doing quasi-reactive sputtering (use some 0.3-0.5% O2 in the flow) or doing reactive sputtering with a Zn target. In case of LPCVD, dimethylzinc can be used as a precursor. All described technologies have been/are being used in the PV industry for intrinsic and doped ZnO.
ZnO nanoparticle can be dispersed in water or ethanol at lower concentration and can be spin coated followed by annealing at 150C for 10 min to obtain thin ZnO layer.
You can also use a pallet of ZnO and ion beam sputter deposit ZnO onto glass substrate. THis would be better since the sticking cooefficient of ion beam sputter deposited films is better
It is easy to do this. You can either using sol-gel process or sputtering from a ZnO target. If you have ALD, you can also use ALD to achieve a very uniform ZnO thin layers. For sol-gel, you can refer to the preparation of ZnO seed layers for growing ZnO Nanowires using hydrothermal method.
you can also used Electron Beam Evaporation Technique.
http://www.iitg.ernet.in/physics/fac/giri/peer_j/paper/SRIMNC2007.pdf
If you want to convert Zn thin film to ZnO thin film, annealing Zn thin film in air more then 250 C temperature.
By sol gel. Check this out:
http://hint.skku.edu/master/pds_notice/Download/HINT_20100929210927.pdf
Sol-gel procedure if you want thin layer, thicker layer you can get by hydrothermal treatment. Procedure is described here: http://onlinelibrary.wiley.com/doi/10.1002/adfm.201200214/abstract and http://onlinelibrary.wiley.com/doi/10.1002/pssa.201370035/abstract.
Aqueous chemical method is very simple. plz read my PhD thesis here for more details.
http://liu.diva-portal.org/smash/get/diva2:424214/FULLTEXT01.pdf
You need a thin film of ZnO.
If you have a thin film deposition system, try to deposit a thin Zn metallic film, and you can oxidise this film in a furnace. But this may give you a very haphazard, and a very rough film.
alternately you can prepare ZnO films by very simple chemical techniques, and spinning out the solutions, dipping the glass substrates into the solutions.
K. Sreenivas
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