To make patterns of ITO over glass plate I need to etch ITO in some portions. I have known the etching solution is aqua-regia and I have also performed the desired pattern by using this solution. Now I eager to know the chemistry behind this.
Dear friend, very interesting question. I am interested to your question and will explain in detail soon (similar to my case). A bit hurry for this time, please remind me.
However, the easiest way is searching the related document by typing the keywords into google scholar. You will find some related articles.
If yet to find the articles, do not hesitate to let me know. InsyaALLAH I will help you in detail.
Good luck. Dr Zol Bahri - Universiti Malaysia Perlis
Dear Shamjid,
Here it is an interesting article dealing with ITO etching by HCl and aqua regia...a standard mixture is 3:1 HCl:HNO3.
http://wcam.engr.wisc.edu/Public/Reference/WetChemistry/ITO%20wet%20etch%20HCl.pdf.
Regards
Mohamed
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