Consult any research level semiconductor device or MOSFET book e.g. SM Sze etc. You may also consult Ist, 2nd or 3rd level SPICE Models.
If you are using Cadence software then you can find in Model parameter (Cox, Cgs, Y..and many more parameter) in DC operating point.
In case you are asking for extracting the process parameters of MOSFET, there are number of tools available of Cadence, Mentor or Synopsis etc for design objectives. You may use Silvaco also for device siulation purposes. My first post in this regard was for MOS parameters' study purpose only.
In the book of Jacob Baker "CMOS. Circuit Design, Layout, and Simulation." See chapter about PSPICE parameter for 180 nm MOSFET model.
u can find them in the file u r using
i am adding the details written in the file when u open the file through notepad
*T92Y SPICE BSIM3 VERSION
*3.1 PARAMETERS
*SPICE 3f5 Level 8, Star-HSPICE Level 49, UTMOST Level 8
* DATE: May 21/09
* LOT: T92Y WAF: 9103
* Temperature_parameters=Default
.MODEL CMOSN NMOS ( LEVEL = 49
+VERSION = 3.1 TNOM = 27 TOX = 4.1E-9
+XJ = 1E-7 NCH = 2.3549E17 VTH0 = 0.3694303
+K1 = 0.5789116 K2 = 1.110723E-3 K3 = 1E-3
+K3B = 0.0297124 W0 = 1E-7 NLX = 2.037748E-7
+DVT0W = 0 DVT1W = 0 DVT2W = 0
+DVT0 = 1.2953626 DVT1 = 0.3421545 DVT2 = 0.0395588
+U0 = 293.1687573 UA = -1.21942E-9 UB = 2.325738E-18
+UC = 7.061289E-11 VSAT = 1.676164E5 A0 = 2
+AGS = 0.4764546 B0 = 1.617101E-7 B1 = 5E-6
+KETA = -0.0138552 A1 = 1.09168E-3 A2 = 0.3303025
+RDSW = 105.6133217 PRWG = 0.5 PRWB = -0.2
+WR = 1 WINT = 2.885735E-9 LINT = 1.715622E-8
+XL = 0 XW = -1E-8 DWG = 2.754317E-9
+DWB = -3.690793E-9 VOFF = -0.0948017 NFACTOR = 2.1860065
+CIT = 0 CDSC = 2.4E-4 CDSCD = 0
+CDSCB = 0 ETA0 = 2.665034E-3 ETAB = 6.028975E-5
+DSUB = 0.0442223 PCLM = 1.746064 PDIBLC1 = 0.3258185
+PDIBLC2 = 2.701992E-3 PDIBLCB = -0.1 DROUT = 0.9787232
+PSCBE1 = 4.494778E10 PSCBE2 = 3.672074E-8 PVAG = 0.0122755
+DELTA = 0.01 RSH = 7 MOBMOD = 1
+PRT = 0 UTE = -1.5 KT1 = -0.11
+KT1L = 0 KT2 = 0.022 UA1 = 4.31E-9
+UB1 = -7.61E-18 UC1 = -5.6E-11 AT = 3.3E4
+WL = 0 WLN = 1 WW = 0
+WWN = 1 WWL = 0 LL = 0
+LLN = 1 LW = 0 LWN = 1
+LWL = 0 CAPMOD = 2 XPART = 0.5
+CGDO = 8.58E-10 CGSO = 8.58E-10 CGBO = 1E-12
+CJ = 9.471097E-4 PB = 0.8 MJ = 0.3726161
+CJSW = 1.905901E-10 PBSW = 0.8 MJSW = 0.1369758
+CJSWG = 3.3E-10 PBSWG = 0.8 MJSWG = 0.1369758
+CF = 0 PVTH0 = -5.105777E-3 PRDSW = -1.1011726
+PK2 = 2.247806E-3 WKETA = -5.071892E-3 LKETA = 5.324922E-4
+PU0 = -4.0206081 PUA = -4.48232E-11 PUB = 5.018589E-24
+PVSAT = 2E3 PETA0 = 1E-4 PKETA = -2.090695E-3 )
*
.MODEL CMOSP PMOS ( LEVEL = 49
+VERSION = 3.1 TNOM = 27 TOX = 4.1E-9
+XJ = 1E-7 NCH = 4.1589E17 VTH0 = -0.3823437
+K1 = 0.5722049 K2 = 0.0219717 K3 = 0.1576753
+K3B = 4.2763642 W0 = 1E-6 NLX = 1.104212E-7
+DVT0W = 0 DVT1W = 0 DVT2W = 0
+DVT0 = 0.6234839 DVT1 = 0.2479255 DVT2 = 0.1
+U0 = 109.4682454 UA = 1.31646E-9 UB = 1E-21
+UC = -1E-10 VSAT = 1.054892E5 A0 = 1.5796859
+AGS = 0.3115024 B0 = 4.729297E-7 B1 = 1.446715E-6
+KETA = 0.0298609 A1 = 0.3886886 A2 = 0.4010376
+RDSW = 199.1594405 PRWG = 0.5 PRWB = -0.4947034
+WR = 1 WINT = 0 LINT = 2.93948E-8
+XL = 0 XW = -1E-8 DWG = -1.998034E-8
+DWB = -2.481453E-9 VOFF = -0.0935653 NFACTOR = 2
+CIT = 0 CDSC = 2.4E-4 CDSCD = 0
+CDSCB = 0 ETA0 = 3.515392E-4 ETAB = -4.804338E-4
+DSUB = 1.215087E-5 PCLM = 0.96422 PDIBLC1 = 3.026627E-3
+PDIBLC2 = -1E-5 PDIBLCB = -1E-3 DROUT = 1.117016E-4
+PSCBE1 = 7.999986E10 PSCBE2 = 8.271897E-10 PVAG = 0.0190118
+DELTA = 0.01 RSH = 8.1 MOBMOD = 1
+PRT = 0 UTE = -1.5 KT1 = -0.11
+KT1L = 0 KT2 = 0.022 UA1 = 4.31E-9
+UB1 = -7.61E-18 UC1 = -5.6E-11 AT = 3.3E4
+WL = 0 WLN = 1 WW = 0
+WWN = 1 WWL = 0 LL = 0
+LLN = 1 LW = 0 LWN = 1
+LWL = 0 CAPMOD = 2 XPART = 0.5
+CGDO = 7.82E-10 CGSO = 7.82E-10 CGBO = 1E-12
+CJ = 1.214428E-3 PB = 0.8461606 MJ = 0.4192076
+CJSW = 2.165642E-10 PBSW = 0.8 MJSW = 0.3202874
+CJSWG = 4.22E-10 PBSWG = 0.8 MJSWG = 0.3202874
+CF = 0 PVTH0 = 5.167913E-4 PRDSW = 9.5068821
+PK2 = 1.095907E-3 WKETA = 0.0133232 LKETA = -3.648003E-3
+PU0 = -1.0674346 PUA = -4.30826E-11 PUB = 1E-21
+PVSAT = 50 PETA0 = 1E-4 PKETA = -1.822724E-3 )
All the above parameters are quantized inside the library model for different corner conditions.
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