There are quite a few brands that you can use. Comsol is a not too bad option, CoventorWare is fantastic but the price is a bit high and of course ANSIS. Personally I'd suggest to use CoventorWare in combination with comsol...
respected researcher, Jashua , thanks for keen response i will go for registered in COMSOL
We are using IntelliSuite, mainly for coupled electrostatics/mechanics and piezo simulations, and pretty happy with it. It also allows to emulate fabrication processes and to link together layout/fab/simulation.
Any Multi physics software can solve this problem. Actually you just need electrostatic couping with mechanical behavior. Softwares like ANSYS, COMSOL, Conventorware can be used to solve the parameters. To compute RF parameters you can use HFSS, Sonnet or any other EM solver. Although Multi physics software can also solve for RF performance.
Regarding free tool, try Sonnet Lite, or Sugar simulator.
I recommend CoventorWare specifically for MEMS applications. The advantage is that you can extract files to make mask directly from CoventorWare, if you plan for fabrication afterwards
Try Coventorware or Intellisuit software...these are specialized software for MEMS only.
No software is perfect for MEMS.. Coventorware software is primarliy designed for MEMS and it works well.. quick expensive though.. On the other hand you can also give try for COMSOL Multiphysics - MEMS module... its not as expensive as coventorware.. ..
maybe FEAtool working on Octave and Matlab ... it is free.
https://www.featool.com/get-featool/
Do check out IntelliSuite software. It is an end-to-end tool for MEMS process simulation applications and coupled field FEA.
www.intellisense.com
hi, there are quite a few options... however those are divided into two: free or not. If you've enough money the main option can be CoventorWare and Comsol... The firstone can give you quite good results and the second is good enough...
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