I have deposited Al on SS201 by DC magnetron sputtering
I want to make AlN by annealing Al deposited SS201 in N2 environment
At what temperature AlN will form
Similarly at what temp will I get TiAlN ( annealing TiAl in N2 environment in TF)
AlN (Aluminum Nitride) is a compound that can be synthesized in a tube furnace through a process known as chemical vapor deposition (CVD). The specific temperature at which AlN forms in a tube furnace depends on the CVD process parameters, including the precursor gases, pressure, and heating rate.
Typically, AlN is formed by reacting aluminum-containing precursor gases, such as trimethylaluminum (TMA) or aluminum chloride (AlCl3), with ammonia (NH3) as the nitrogen source. The reaction occurs on a heated substrate inside the tube furnace, where the gases decompose and react to deposit AlN as a thin film or coating on the substrate surface.
The temperature range for AlN formation in a tube furnace is usually around 800°C to 1200°C, depending on the specific CVD setup and requirements. Higher temperatures tend to promote faster deposition rates and may enhance the film quality, but they also come with potential challenges related to material compatibility and process control.
It is important to note that the exact temperature and other process parameters should be determined experimentally based on the specific CVD system and the desired properties of the AlN film. Additionally, the choice of precursor gases, flow rates, and other conditions plays a crucial role in controlling the deposition process and achieving the desired film characteristics.
You can form easily AlN by dc magnetron, and preferably rf magnetron sputtering.
There are so many papers in the reported literature. Maybe a high substrate temperature is required.
You should do reactive sputtering of Aluminum in pure nitrogen sputtering gas atmosphere.
Aluminum nitride (AlN) can be formed in a tube furnace at temperatures ranging from 1000 to 1200 degrees Celsius. However, it may reach up to 1600 degrees Celsius depending on the working conditions.
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