This very recent review should give you all the references you need

http://scitation.aip.org/content/aip/journal/jap/113/2/10.1063/1.4757907

We are using TDMAT and Ammonia, with N2 as purging gas to grow TiN in our ALD.

Also one can use TiCl4 precursor to grow TiN.

We are using TDMAT and Ammonia, with N2 as purging gas to grow TiN in our ALD.

Also one can use TiCl4 precursor to grow TiN.