Hi, the company I intern for recently acquired a plasma ashing/etching chamber and unfortunately, we don’t have any manual or operations guide to teach us how to use it. I’ve attached a picture of the system to this post, and if anyone has seen something like this or has any helpful info about this system I would appreciate it! (The paper shown in the picture is just instructions for turning on the screen).
Hello,
You should buy an HDRF tool like Navigator or Odyssey from PlasmaTherm:
http://plasmatherm.com/odyssey.html
http://plasmatherm.com/navigator.html
High Density of Radical Flux for ashing/etching with high performance.
But, concerning your Ashing tool, you should find some information from C2N Paris Saclay :
The Centre for Nanoscience and Nanotechnology (C2N) is one of the largest laboratories of University Paris- Sud. It is a joint unit between University Paris-Sud and the French national research council (CNRS). Its activities focus on nanoscience: nanophotonics, nanoelectronics and micro-nano systems. IEF at UPS hosts one major nanotechnology clean-room facilities in France, the CTU IEF-Minerve. Within the Photonics Department, the QCL team has a long track record on intersubband devices science and technology in various material systems, including HDRF Navigator ,and JVC.
Main contact: Dr. Raffaele COLOMBELLI – Email: [email protected]
Centre for Nanoscience and Nanotechnology (C2N) 15 Rue Georges Clémenceau, 91405 Orsay Cedex Tel: +33 1 69 15 78 65 Website: www.c2n.universite-paris-saclay.fr/en/
Do you already have attached all the gaslines and watercooling lines and so on?
Marc Segers Thank you. We already bought a chamber so we are not looking to buy another one, but I will contact Dr. Raffaele Colombelli.
Nina Feldhofer We have lines attached to the system but they are currently not hooked up to any water or gas supplies yet.
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