Maia Kushnaroff

2 Questions 3 Answers 0 Followers

Questions related from Maia Kushnaroff

Any info on recently acquired ashing/etching chamber?

Hi, the company I intern for recently acquired a plasma ashing/etching chamber and unfortunately, we don’t have any manual or operations guide to teach us how to use it. I’ve attached a picture of...

09 July 2019 780 3 View

Insulating coating for etching SiO2 with SF6 or CF4?

I will be etching a silicon dioxide wafer with either CF4 or SF6 in a stainless steel chamber. I have 2 questions: If I wanted to electrically insulate the chamber what would be a good material...

01 July 2019 910 2 View