Nina Feldhofer

3 Questions 19 Answers 0 Followers

Questions related from Nina Feldhofer

Etching rate decreased significantly -> why?

In my sputter tool I use an RF etch to clean the wafers of residue and the SiO2 layer (about 30nm) before sputtering onto them. I did not change any parameters but the etching rate dropped so...

03 March 2020 2,782 7 View

Can I hold all wafer thicknesses with the same lever lock wafer tweezer?

I am thinking about buying new tweezers that are easier to handle. As i am working with wafer (6-8") that differ in the thickness I am not sure if I can use a manual tweezer with a lever lock for...

10 January 2019 1,685 1 View

How and how often should wafer tweezers be cleaned?

Hi, all this questions considering everyday constant use of the tweezers. And what is the most clean way to manually handle wafers? Nina

09 January 2019 7,922 4 View