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Questions related from Nina Feldhofer
In my sputter tool I use an RF etch to clean the wafers of residue and the SiO2 layer (about 30nm) before sputtering onto them. I did not change any parameters but the etching rate dropped so...
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I am thinking about buying new tweezers that are easier to handle. As i am working with wafer (6-8") that differ in the thickness I am not sure if I can use a manual tweezer with a lever lock for...
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Hi, all this questions considering everyday constant use of the tweezers. And what is the most clean way to manually handle wafers? Nina
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