I have made XRD stress measurements on several >12µm thick TiN-films on steel substrates. I used Sin2Psi-method in Bragg-Brentano geometry on the (111)-peak of cubic TiN, which gives a good linear behaviour of d-spacing versus sin2Psi, beside the one point at sin2Psi=0°, which always lies slightly above the linear fit line (see jpeg graph). - The TiN-film has a pronounced (111) texture (see second graph).

Is there any explanation why the TiN lattice constant in the textured direction is disproportionately greater than, compared to the tilted d-spacings?

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