One of our friend has done XRD of his thin multilayered samples coated on Si. The layers are TiAlN with two different coatings of Cu on it. There is one strong peak at about 69, which we think is due to Si. What are the other two small peaks at about 2theta= 28 and 33?
Also, why can't we see other peaks from TiAlN structure?
Si also show peak near around 30, so can can try matching those peaks with Si.
Hello,
The peak at 33 ° is also due to silicon. For the peak at 28 °, you should make sure it is not noise.
To guess where this peak at 28 ° comes from, the best is the comparison proposed by M. Palikundwar.
Best regards
Loraine
Hi Azhar,
The peak at 69 is definitely due to the silicon 004 plane and the peak at 33 is due to 002 plane. The peak about at 28 can be due to the sample of your material. Since the sample is very thin layer, the intensity might be low compare to the SIlicon wafer. Check it out with your material's match.
Thank you.
Hi Azahr,
You should try to measure longer to get a better S/N ratio for the area where the weak peaks are.
It is rather hard to identify phases based on one or two peaks only, there will be always many reference cards that are matching.
If I restrict the elements during a search/match to Ti, Al, Si and N some phases come up that have lines these positions.
best regards,
Thomas
Hi Azhar,
The alternative way to judge the orgin of unknown peak is that you can look at the FWHMs of all peaks. Generally speaking, prak width(FWHM) should be similar if it comes from same phases by following Caglioti’s equation. When I look at the peak at 33 deg, it is too much sharpened that seems like single cryslline. Usually this kind of polycrystalline thin film might show more broaden peak and cannot see peak separation of CuKa1 and Ka2.
Thomas Degen , what do you mean by longer? we measured in the long 2theta range, as you can see in the figure also.
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