Why the CD-SEM image contrast is low after lithography ?

Suseendharan Sakthikumar @Suseendharan_Sakthikumar

10 October 2017 1 7K Report

I am doing the characterisation of the EUV photo resist . I tried to do the PSD analysis in the CD-SEM image after lithography but unfortunately the execution fails due to the poor contrast. why the contrast is low after the lithography in CD-SEM ?

Hassan Hafeez

Do you mean 'blurred images'?

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