Why SIPOS didn't perfect growth on downside of wafer in LPCVD process ?

Wiwat Jeungthanasirigool @Wiwat-Jeungthanasirigool-2

14 January 2021 0 10K Report

Our products need SIPOS of LPCVD for protecting insulation. Quality of this layer measure by leakage current. Using N2O and SiH4 inject into horizontal LPCVD furnace which vertical wafer batch inside.

Problem quality of a wafer show upper is better than lower. Why?

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