There two schemes of RF plasma sources (CCP in this case) employed in many cases. See the picture in attachment, it is a quartz tube evacuated to low pressure of about 0.001 mBar. in case A, there are two ring electrode fed by coaxial RF (13.56 MHz) line. the ring electrodes surround the tube diameter from outside. In case B, there are two end plate electrodes, connected similarly. in most cases the out side of the tube is at Atmospheric pressure, the plasma ignites inside the tube and not out side. Why exactly is that? I guess it has to do with mean free path and energy gain for electrons etc, or there is something else with the way electric field is setup in the system?
What happens if the quarty tube is placed entirely in vacuum, so that the checkered area is also evacuated to low pressure, (say 0.001, mBar)? Would that cause plasm to ignite inside as well as outside the quartz tube?