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Questions related from Samir Chauhan
There two schemes of RF plasma sources (CCP in this case) employed in many cases. See the picture in attachment, it is a quartz tube evacuated to low pressure of about 0.001 mBar. in case A, there...
18 August 2022 2,546 4 View
Can some one guide me to some basic literature about designing inductively coupled RF discharge (preferably cylindrical). How to decide the diameter, number of turns, frequency, power, gas...
02 February 2022 4,735 2 View
DC glow discharge is hard to ignite in very low pressure of 0.001 mabar. For small systems (30 cm dia) the electron ionization mean free path routinely exceeds the system dimension for such a low...
12 January 2016 5,496 3 View
In DC glow discharge during operation the Cathode and Anode materials gets heated up. The heat it receives depends on current density (Flux of particles) and particle type velocity etc. Are the...
21 July 2014 4,946 3 View
In DC discharge trace oxygen or intentional oxygen forms negative ions and stimulates oxide formation on on of the electrode (Anode). Can anyone suggest reference work in field of such oxide...
19 July 2014 9,954 2 View
I want to simulate single particle trajectory in highly inhomogeneous magnetic field of planar magnetron and relatively simple magnetic field. (1) please suggest me a method or example using...
18 July 2014 5,022 3 View
