While analysing the Al alloy sample via XPS, I am getting the Oxygen value of 80% on the surface. Then I etched with an interval of 30sec, 30 sec, 1 min, 5 min, 10 min. The last etched surface provided me the Oxygen content to be 50% even though I reached within the material. It should not happen. What would be the possible reason behind this behavior? Can someone provide me with relevant literature?